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Book Vacuum Science and Technology

Book Vacuum Science and Technology

Information about a book on Vacuum Science and Technology

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E.P.T.M. Suurmeijer August 13, 2017 No comments

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Contents

Book Sections

  • Preface
  • Contents
  • Basic concepts
  • Gas-solid interaction
  • Flow of gases through tubes and orifices
  • Vacuum pumps and pumping systems
  • Pressure measurement
  • Partial pressure gauges and residual gas analysis
  • Measurements of pump properties
  • Leak detection
  • Sealing techniques and system components
  • Material selection lubrication cleaning working discipline
  • Appendices
  • Index
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